Beilstein J. Nanotechnol.2010,1, 163–171, doi:10.3762/bjnano.1.20
frequency. The results obtained agree very well with measurement data reported previously.
Keywords: MEMS; microscalefrictionreduction; normal force modulation; stochastic Prandtl–Tomlinson model; surface roughness; Introduction
With the invention of the friction force microscope (FFM) by Mate et al. [1
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Figure 1:
Schematic top view of the MEMS tribometer for studying microscale friction [19]. Several slider types h...